| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge detecting device including a function which can determine the whole shielding state by a transparent workpiece, and suitable for workpiece detection specially when a transparent body covers a whole measurement range.SOLUTION: An edge detecting device comprises: a line sensor 1; a light source 2 for emitting monochromatic light toward the line sensor 1; edge position analyzing means 4a for detecting an edge position of a transparent body 3 in a pixel array direction of the line sensor 1 from amount-of-light data distribution of Fresnel diffraction in an edge of the transparent body 3 positioned in an optical path of the monochromatic light; and whole shielding state determining means 4b for determining the whole shielding state by the transparent body 3 by detecting a recessed part smaller than a prescribed threshold value when the edge position of the transparent body 3 cannot be further detected by the edge position analyzing means 4a, and when the total amount of received light by the line sensor 1 is smaller than the preliminarily stored total amount of received light in a whole light incident state of the line sensor 1.SELECTED DRAWING: Figure 1 |
