发明名称 Light source device
摘要 A light source device (10) wherein the high-temperature plasma state after the start of the lighting is maintained stably and the light emission can be maintained stably and a decrease of the lighting life cycle by means of a heating of the light emission tube (1) is suppressed comprises a light emission tube (1), in which a light emitting means is enclosed, and a pulsed laser oscillator part (2) emitting a pulsed laser beam towards said light emission tube (1), wherein a continuous-wave laser oscillator part is provided emitting a continuous-wave laser beam towards said light emission tube (1).
申请公布号 EP2280408(B1) 申请公布日期 2016.12.21
申请号 EP20100007808 申请日期 2010.07.27
申请人 Ushio Denki Kabushiki Kaisha;Energetiq Technology, Inc. 发明人 Yokota, Toshio
分类号 H01J65/04;G03F7/20 主分类号 H01J65/04
代理机构 代理人
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