| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of a particulate substance capable of improving adhesion of a coat layer onto a particle.SOLUTION: A film deposition process for depositing a coat layer in sputtering on the surface of a particle is provided in a method for producing a particulate substance including particles and each coat layer containing carbon (C) and formed on each particle. In the film deposition process, sputtering deposition is performed by using a target containing an organic material, while moving and heating particles under a reduced pressure. |
