| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputtering device capable of preventing a film deposited on a holding jig from being exfoliated easily, and improving the operation rate by reducing a moisture amount adsorbed onto the holding jig, and to provide a production method of a solar cell.SOLUTION: A sputtering device has a constitution including a film deposition chamber in which a sputtering target is arranged, and a holding jig arranged in the film deposition chamber during a deposition process, for holding a substrate which is a film deposition object. In the holding jig, surface roughness of a face (34) facing to the sputtering target is greater than surface roughness of other faces (35, 36) exposed to a region where sputtering particles are scattered. |
