发明名称 搬送製膜装置
摘要 PROBLEM TO BE SOLVED: To provide a film conveying and forming apparatus capable of handling and conveying a base material without being in contact with a thin film formed while performing film forming processing on a front surface of the base material by a roll-to-roll method.SOLUTION: A film conveying and forming apparatus continuously conveys a thin plate long body of a base material from a feeding reel section to a take-up reel section and performs a predetermined processing on the base material being conveyed to form a thin film on a front surface of the base material. The film conveying and forming apparatus includes a base material handling section for adjusting a travel state of the base material on a conveying path of the base material. In the base material handling section, a Nelson roller is used. The base material is hung on the Nelson roller so that a rear surface of the base material is in contact with the Nelson roller. Thus, the front surface of the base material is conveyed in a non-contact state from the feeding reel section to the take-up reel section, and processing is performed while the base material is conveyed.
申请公布号 JP6049187(B2) 申请公布日期 2016.12.21
申请号 JP20120283019 申请日期 2012.12.26
申请人 東レエンジニアリング株式会社 发明人 熱田 直行;恩地 卓也;寺田 豊治
分类号 B65H20/02;B65H23/16;H01L31/18 主分类号 B65H20/02
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