发明名称 COATING COMPOSITION, METHOD FOR PRODUCING SAME AND USE THEREOF
摘要 The present invention relates to a coating composition which can be produced from at least one yttrium-containing precursor, a solvent A and a solvent B which is different from solvent A, the ratio of the vapor pressure of solvent A at 20°C to the vapor pressure of solvent B at 20°C being (formula (I)), to a method for producing same and the use thereof.
申请公布号 EP3105779(A1) 申请公布日期 2016.12.21
申请号 EP20150703571 申请日期 2015.02.09
申请人 Evonik Degussa GmbH 发明人 PHAM, Duy Vu;WEBER, Dennis;JAEHNIKE, Felix
分类号 H01L21/316;H01L21/36 主分类号 H01L21/316
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