发明名称 |
COATING COMPOSITION, METHOD FOR PRODUCING SAME AND USE THEREOF |
摘要 |
The present invention relates to a coating composition which can be produced from at least one yttrium-containing precursor, a solvent A and a solvent B which is different from solvent A, the ratio of the vapor pressure of solvent A at 20°C to the vapor pressure of solvent B at 20°C being (formula (I)), to a method for producing same and the use thereof. |
申请公布号 |
EP3105779(A1) |
申请公布日期 |
2016.12.21 |
申请号 |
EP20150703571 |
申请日期 |
2015.02.09 |
申请人 |
Evonik Degussa GmbH |
发明人 |
PHAM, Duy Vu;WEBER, Dennis;JAEHNIKE, Felix |
分类号 |
H01L21/316;H01L21/36 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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