| 摘要 |
PROBLEM TO BE SOLVED: To provide a working fluid purification system which achieves downsizing of a tank structure and reduction of maintenance and removes fine objects from a working fluid with high accuracy for a long time period.SOLUTION: A working fluid purification system includes: a supply tank 1 which stores a working fluid supplied to a processing device 2; a conveyor tank 3 including a conveyor belt which separates fine objects from the working fluid returned from the processing device to discharge the fine objects; and a circulation supply passage 4 which supplies the working fluid to the processing device from the supply tank, returns the working fluid used in the processing to the conveyor tank, sends the working fluid to the supply tank, and circulates the working fluid to supply the working fluid. The conveyor tank and the supply tank communicate with each other through a wire screen 50. The wire screen is formed by arranging wires in parallel to each other.SELECTED DRAWING: Figure 1 |
