FABRY-PEROT INTERFERENCE FILTER

摘要

A Fabry-Perot interference filter 10A includes a fixed mirror 31 and a movable mirror 41 disposed opposite to the fixed mirror 31 via a gap S, distance between the fixed mirror 31 and the movable 41 in a light transmission region 11 being adjusted by electrostatic force. A plurality of first annular grooves 44 surrounding the light transmission region 11 and a plurality of first through-holes 45 opening to the gap S side and the opposite side are formed at a surrounding portion 41 a surrounding the light transmission region 11 in the movable mirror 41.