| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film deposition device, whose manufacturing is easy, which is capable of being easily applied to mass-production process of large substrates, and whose manufacturing yield and deposition efficiency are improved, an organic light-emitting display device manufacturing method using the thin film deposition device, and an organic light-emitting display device manufactured using the thin film deposition device.SOLUTION: A thin film deposition device includes a plurality of thin film deposition assemblies, each of which includes deposition sources, a deposition source nozzle part in which a plurality of deposition source nozzles are formed, a patterning slit sheet in which a plurality of patterning slits are formed, and an interruption plate assembly including a plurality of interruption plates for partitioning a space between the deposition source nozzle part and the patterning slit sheet into a plurality of deposition spaces. The thin film deposition device is formed so as to be spaced apart from substrates by approximately a prescribed distance, the thin film deposition device and the substrates are formed so that one of them is freely movable relative to the other, and each deposition source is provided with a red light emitting layer material, a green light emitting layer material, a blue light emitting layer material, or an auxiliary layer material. |
