| 摘要 |
PROBLEM TO BE SOLVED: To stably operate an ion source over a long period by suppressing evaporation of a carbon compound generated inside a vessel for plasma production.SOLUTION: An ion source IS, generating ion beams containing carbon ions, includes: a plasma generation vessel 1 to which process gas containing at least carbon and dillution gas containing at least helium are supplied; and a thermal electron emission section which is disposed at an end of the plasma generation vessel 1 to be electrically separated from a vessel wall surface, and emits thermal electrons. |
