发明名称 カラーフィルタの製造方法、固体撮像素子の製造方法、及び液晶表示装置の製造方法
摘要 Provided are: a method that is for producing a color filter and that can increase the rectangularity of a color filter pixel array pattern by means of increasing mask tracking and can increase the likelihood of exposure latitude (mask tracking) and focal depth without loss of throughput; a color filter produced using same; a solid-state imaging element; and a liquid crystal display device. The method for producing a color filter has: a step for exposing a photosensitive colored layer containing a radical polymerizable monomer and a photo-radical initiator using a photomask for a color filter pixel array; and a step for forming the color filter pixel array pattern by means of developing the post-exposure photosensitive colored layer. The exposure is performed split into a plurality of instances in succession at the same coordinates.
申请公布号 JP6047417(B2) 申请公布日期 2016.12.21
申请号 JP20130029361 申请日期 2013.02.18
申请人 富士フイルム株式会社 发明人 吉林 光司
分类号 G02B5/20;G02B5/22;G02F1/1335;G03F7/004;H01L27/14 主分类号 G02B5/20
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