发明名称 光導波路及びその製造方法
摘要 PROBLEM TO BE SOLVED: To provide a tapered optical waveguide capable of easily recognizing the position of a portion which is thin in thickness of a core pattern having a taper in a thickness direction and a method for manufacturing the optical waveguide.SOLUTION: An optical waveguide 100 includes: a lower clad layer 21; a core layer 22 laminated on the lower clad layer 21 as one example of a core part in which an optical signal propagates; and a protrusion 60 formed at a surface side opposite to the core part in the lower clad layer 21. A protrusion neighboring portion as a portion in the neighborhood of the protrusion 60 is thin in thickness in the core part. The core part has a taper part 22c which becomes thicker in thickness of the core part according as it goes in a propagating direction in which the optical signal propagates from the protrusion neighboring portion in the core part. A method for manufacturing the optical waveguide 100 includes a push-in process of pushing in the protrusion 60 such that the protrusion neighboring portion becomes thin in thickness in the case of carrying out a core part formation process of forming the core part after a protrusion formation process of forming the protrusion 60. The push-in process is carried out simultaneously with or after the core part formation process.
申请公布号 JP6048032(B2) 申请公布日期 2016.12.21
申请号 JP20120209967 申请日期 2012.09.24
申请人 日立化成株式会社 发明人 酒井 大地;黒田 敏裕;皆川 一司;青木 宏真;別井 洋;瀬川 幸太;内ヶ崎 雅夫
分类号 G02B6/132;G02B6/122 主分类号 G02B6/132
代理机构 代理人
主权项
地址