SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND MEASUREMENT METHOD USING THE SAME

摘要

A scanning electron microscope capable of controlling the spot of an electron beam and a measurement method using the same. The scanning electron microscope includes electron magnets disposed in a path in which an electron beam irradiated to a sample moves from the electron beam source of the scanning electron microscope to a sample and configured to control and irradiate the spot of the electron beam in a linear electron beam having a different horizontal to vertical ratio. A control unit controls a ratio and direction of the spot of the electron beam by controlling a supply voltage of the electron magnets.

主权项

1. A scanning electron microscope (SEM), comprising:
electron magnets disposed in a path in which an electron beam irradiated to a sample moves from an electron beam source of the scanning electron microscope to a sample and configured to control and irradiate a spot of the electron beam in a linear electron beam having a different horizontal to vertical ratio; and a control unit to control a ratio and direction of the spot of the electron beam by controlling a supply voltage of the electron magnets.