PRODUCTION METHOD OF SUBSTRATE HAVING TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a production method of a substrate having a transparent conductive film, with which unremoved residue produced in removal of the transparent conductive film with laser is prevented from adhering to an electrode part or the like.SOLUTION: A production method of a substrate 10 having a transparent conductive film, which includes a substrate 1 having a first main surface 1a and a second main surface 1b and a transparent conductive film 2 arranged on the first main surface 1a, and in which the transparent conductive film 2 is patterned with irradiation of laser 20, includes: a step to prepare the substrate 10 having the transparent conductive film in which the transparent conductive film 2 before patterning is arranged; a step to bring a liquid 30 which is transparent to the laser 20 into contact with the transparent conductive film 2; and a step to focus the laser 20 on the transparent conductive film 2 in contact with the liquid 30, and to remove a part of the transparent conductive film 2 so as to conduct patterning.SELECTED DRAWING: Figure 2