| 摘要 |
PROBLEM TO BE SOLVED: To detect mechanical vibration at a high speed and a high sensitivity.SOLUTION: A vibration detector (100) of the present invention detects the mechanical vibration of a mechanical vibration element (5) including a vibration part (51). The vibration detector includes: a probe (4) whose one end is disposed near the vibration part of the mechanical vibration element; a first inductor (3) whose one end is connected to the other end of the probe; and a reflected signal detection part (1) for applying an AC signal (20) to the other end of the first inductor and detecting a reflected signal (21) of the AC signal output from the other end of the first inductor.SELECTED DRAWING: Figure 1 |
