| 发明名称 |
IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE |
| 摘要 |
An imprint apparatus which forms a pattern of an imprint material in a region to be processed on a substrate by using a mold includes an observing unit configured to include a light source which emits first light and a receiving unit which receives the first light which is emitted from the light source, is reflected by the region to be processed, and passes through the mold; a deforming unit configured to thermally deform the region to be processed by illumination with second light; and a combining member which combines the first light of the light source and the second light from the deforming unit and guides the first light and the second light to the region to be processed. |
| 申请公布号 |
US2016363875(A1) |
申请公布日期 |
2016.12.15 |
| 申请号 |
US201615177128 |
申请日期 |
2016.06.08 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Shinoda Ken-ichiro;Ota Shunsuke;Miyaharu Takafumi |
| 分类号 |
G03F9/00;B29C59/02;G03F7/00 |
主分类号 |
G03F9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An imprint apparatus which forms a pattern of an imprint material in a region to be processed on a substrate by using a mold, comprising:
an observing unit configured to include a light source which emits first light and a receiving unit which receives the first light which is emitted from the light source, is reflected by the region to be processed, and passes through the mold; a deforming unit configured to thermally deform the region to be processed by illumination with second light; and a combining member which combines the first light of the light source and the second light from the deforming unit and guides the first light and the second light to the region to be processed. |
| 地址 |
Tokyo JP |
