| 发明名称 |
COMPOSITION FOR NANOIMPRINT, CURED PRODUCT, PATTERN FORMING METHOD, AND ARTICLE HAVING PATTERN |
| 摘要 |
A composition for nanoimprint including a cycloolefin-based copolymer; a polymerizable monomer; and a photoinitiator. The polymerizable monomer of the present invention may include a polyfunctional monomer, and the cycloolefin-based copolymer may include a constituent unit having a cyclic olefin and a constituent unit having an acyclic olefin. |
| 申请公布号 |
US2016363858(A1) |
申请公布日期 |
2016.12.15 |
| 申请号 |
US201615173925 |
申请日期 |
2016.06.06 |
| 申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SHIMATANI Satoshi |
| 分类号 |
G03F7/00;G03F7/34;G03F7/20;H01L21/027;G03F7/16 |
主分类号 |
G03F7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A composition for nanoimprint comprising:
a cycloolefin-based copolymer; a polymerizable monomer; and a photoinitiator. |
| 地址 |
Kawasaki-shi JP |
