Multi-Layer Absorptive Wire Grid Polarizer

摘要

A wire grid polarizer comprising on array of parallel, elongated first rib groups disposed over a substrate. Each first rib group can comprise a central first transmissive rib and a pair of first wires including a first wire disposed along each side of the first transmisslve rib. A first dielectric material can substantially fill first gaps between each rib group and an adjacent rib group. An array of parallel, elongated second wires can be disposed over the rib groups and the first dielectric material. The first wires or the second wires can be absorptive and the other of the first wires or the second wires can be reflective.

主权项

1. A wire grid polarizer comprising:
a. a transmissive substrate; b. an array of parallel, elongated first rib groups disposed over the substrate, each first rib group comprising:
i. a central first transmissive rib; andii. a pair of first wires including a first wire disposed along each side of the first transmissive rib; c. a first dielectric material substantially filling first gaps between each rib group and an adjacent rib group; d. an array of parallel, elongated second wires disposed over the rib groups and the first dielectric material; e. the first wires or the second wires are absorptive and the other of the first wires or the second wires are reflective; and f. a pitch of the first wires is less than a pitch of the second wires.