| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment apparatus with which variation and deviation relating to the throughput are markedly reduced.SOLUTION: The surface treatment apparatus performs a surface treatment by bringing a treatment liquid into contact with both front and rear surfaces of a plate- or film-like object to be treated having a predetermined thickness, and includes: a reaction vessel having an upper face wall, a lower face wall, and an opening through which the object to be treated is introduced or discharged; a treatment liquid downward supplying part which is provided on the upper face wall of the reaction vessel and downwardly supplies the treatment liquid toward inside the reaction vessel; and a treatment liquid upward supplying part which is provided on the lower face wall of the reaction vessel and upwardly supplies the treatment liquid toward inside the reaction vessel. |
