| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device that performs inspection of an object by using an image obtained by photographing the object while projecting a pattern image onto the object, the inspection device for suppressing secondary reflection noise and enabling reliable measurement and inspection; and a control method of the inspection device.SOLUTION: When there is a secondary reflection object that may generate secondary reflection caused by light reflected on a reflection surface of another object, a control device performs control of changing a projection range of a pattern image to be projected from a projection device so that light does not fall on the reflection surface, or setting a projection position of the pattern image so that the reflection surface falls out of the projection range of the pattern image to be projected from the projection device.SELECTED DRAWING: Figure 4 |
