| 摘要 |
PROBLEM TO BE SOLVED: To enable manufacturing cost to be prevented from increasing and a rotation direction of a movable electrode to be uniquely determined when voltage is applied across a fixed electrode and the movable electrode.SOLUTION: In a torsional vibrator, a holding member 130 attaches a movable electrode 120 to a frame body 110 and serves as an axle of the movable electrode 120. Two first fixed electrodes 140 are opposite to each other across the movable electrode 120, and are juxtaposed in a direction crossing the axle of the movable electrode 120. A second fixed electrode 150 is insulated from the movable electrode 120 and the two first fixed electrodes 140, and its center in plan view does not overlap with the holding member 130. In a thickness direction of the second fixed electrode 150, at least a part thereof overlaps with the movable electrode 120, and the center thereof does not overlap with the center of the movable electrode 120 in its thickness direction. |
