| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength tunable surface-emitting laser capable of changing the oscillating laser light over a wide wavelength band, while suppressing generation of internal stress in a lower DBR layer.SOLUTION: A wavelength tunable surface-emitting laser has a fixed substrate 2, a lower DBR layer 3, a lower contact layer 4, an active layer 5, an upper contact layer 6, deposited sequentially on the upper surface of the fixed substrate 2, and an upper DBR layer arranged oppositely to the upper side of the fixed substrate 2, and displaceably in the vertical direction for the fixed substrate 2. The lower DBR layer 3 is formed by laminating a plurality of low refractive index layer composed of an oxide, and a plurality of high refractive index layer having a refractive index higher than that of the low refractive index layer alternatively. In the lower DBR layer 3, opening holes 33 formed entirely in a vertical direction and opening upward are arranged while being dispersed over the whole area of the lower DBR area 3.SELECTED DRAWING: Figure 4 |
