| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device advantageous for reducing the exchange frequency of a supply section for supplying an imprint material.SOLUTION: An imprint device for patterning an imprint material on the shot region of a substrate by using a mold includes a supply section having a plurality of spouts for discharging the imprint material, respectively, and supplying the imprint material to the substrate, and a control section for controlling the supply section so as to supply the imprint material from the plurality of spouts onto the shot region. The control section determines a spout used for supplying the imprint material to the shot region, based on the discharge history information indicating the history that each of the plurality of spouts discharged the imprint material.SELECTED DRAWING: Figure 1 |
