发明名称 |
SENSOR WITH IMPROVED THERMAL STABILITY |
摘要 |
Improved sensors are disclosed that include a heater resistor (112) and/or one or more sensor resistors (114). In some instances, the heater resistor (112) may be configured to have a zero or near-zero temperature coefficient of resistance (TCR), while one or more sensor resistors (114) may be configured to have a non-zero higher TCR. In some instances, the heater resistor (112) may include a polysilicon material that is doped with a first concentration of dopant (306), and the one or more sensing elements may include a polysilicon material that is doped with a second higher concentration of dopant (306). In some cases, the first concentration of dopant (306) may be configured to provide a heater resistor (112) that has a zero or near-zero temperature coefficient of resistance (TCR). |
申请公布号 |
EP3104137(A1) |
申请公布日期 |
2016.12.14 |
申请号 |
EP20160181279 |
申请日期 |
2012.01.11 |
申请人 |
Honeywell International Inc. |
发明人 |
WANG, Yong-Fa;BECK, Scott Edward |
分类号 |
G01F1/692;G01F1/68;G01F1/684 |
主分类号 |
G01F1/692 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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