| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring characteristics of a semiconductor wafer capable of obtaining electrical characteristics with improved reproductivity, when repeatedly measuring the electrical characteristics of the semiconductor wafer by using a mercury electrode.SOLUTION: A device for measuring characteristics of a semiconductor wafer, which is contacted with the semiconductor wafer by using mercury as an electrode to measure the characteristics of the semiconductor wafer, comprises: a mercury reservoir for housing the mercury; and a conduit introducing the mercury from the mercury reservoir to a contact part with the semiconductor wafer. At least one of the mercury reservoir and the conduit is grounded. |
