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发明名称
Method for Measuring Thickness of Layer in Image Sensor and Pattern Therefor
摘要
申请公布号
KR100853788(B1)
申请公布日期
2008.08.25
申请号
KR20060117374
申请日期
2006.11.27
申请人
发明人
分类号
H01L27/146;H01L21/66
主分类号
H01L27/146
代理机构
代理人
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地址
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