发明名称 振動式センサ装置
摘要 A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter.
申请公布号 JP6044607(B2) 申请公布日期 2016.12.14
申请号 JP20140173987 申请日期 2014.08.28
申请人 横河電機株式会社 发明人 吉田 勇作;吉田 隆司;湯本 淳志
分类号 G01P15/10 主分类号 G01P15/10
代理机构 代理人
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