SYSTEM AND METHOD FOR CLAMPING A WORK PIECE

摘要

A clamping system and a method of clamping a work piece are disclosed. The clamping system has an electrostatic clamp and a high-impedance voltmeter ("HIV"). The electrostatic clamp may include a platen and a plurality of electrodes embedded in the platen. In use, at least some of the embedded electrodes provide one side of a capacitor and a work piece provides another side of the capacitor in order to hold the work piece relative to the platen when at least some of the embedded electrodes are electrically charged. The HIV is electrically connected to at least some of the embedded electrodes.