| 摘要 |
A stage unit is provided to avoid a warpage phenomenon when a substrate is loaded however large the substrate becomes, by directly loading the substrate into a stage where the substrate is ultimately supported. A stage(10) supports a substrate(1), having a groove part(13) that is concave with respect to the upper surface of the stage so that a robot arm for loading and unloading the substrate can laterally be inserted/separated into/from the stage. A bar(20) has a shape corresponding to the groove part to be capable of being closely inserted into the groove part, installed in the groove part in a manner that can move up and down between an unloading position in a lower portion with respect to the upper surface of the stage and a loading position parallel with the upper surface of the stage. A driving unit elevates the bar. The groove part can include a taper groove part(131) that is tapered in a manner that an interval between both lateral surfaces of the groove part reduces as it goes upward. The bar can has an insertion part(21) capable of being closely inserted into the taper groove part.
|
