| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter removing apparatus and a foreign matter removing method, which easily removes a foreign matter residue adhered on a tip of a member for foreign matter removal and prevents the foreign matter residue from falling down on a substrate, resulting in re-adhering.SOLUTION: There is provided the foreign matter removing apparatus for removing the foreign matter adhered on the substrate using a tip of a needle, which includes a residue removing mechanism for removing the foreign matter residue adhered on the tip. |
