发明名称 金属絶縁体金属キャパシタ構造
摘要 Capacitor structures capable of providing both low-voltage capacitors and high-voltage capacitors are described herein. In one embodiment, a capacitor structure comprises a low-voltage capacitor and a high-voltage capacitor. The low-voltage capacitor comprises a first electrode formed from a first metal layer, a second electrode formed from a second metal layer, a third electrode formed from a third metal layer, a first dielectric layer between the first and second electrodes, and a second dielectric layer between the second and third electrodes. The high-voltage capacitor comprises a fourth electrode formed from the first metal layer, a fifth electrode formed from the third metal layer, and a third dielectric layer between the fourth and fifth electrodes, wherein the third dielectric layer is thicker than either the first dielectric layer or the second dielectric layer.
申请公布号 JP6046282(B2) 申请公布日期 2016.12.14
申请号 JP20150563028 申请日期 2014.06.13
申请人 クゥアルコム・インコーポレイテッドQUALCOMM INCORPORATED 发明人 ジャクショカス、レナタス;スリニバス、バイシュナフ;キム、ロバート・ウォン・チョル
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
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