| 摘要 |
A heat treatment receptacle is provided to easily perform a transfer work and to maintain airtightness by forming concave sections on an outer circumference of a flange section. A substrate maintaining implement, a support, and a heat blocking plate are arranged in a heat treatment receptacle(2). The heat treatment receptacle is a quartz process tube. A lateral heat-insulating block(10) includes a heater(12) and covers a lateral regions of the heat treatment receptacle. A heat-insulating ring(13) is installed between a lower surface heat-insulating section(15) of the lateral heat-insulating block and the heat treatment receptacle. A heater bus(14) is installed at a lower of the resultant structure. The heat treatment receptacle has an entrance of a furnace having an opening on a lower surface thereof. A flange section is formed a circumference of the heat treatment receptacle. Concave sections are formed on the flange section at regular intervals.
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