发明名称 TERAHERTZ WAVE PHASE DIFFERENCE MEASUREMENT DEVICE
摘要 In order to provide a high-sensitivity terahertz wave phase difference measurement system having a high S/N ratio, terahertz interference waves are observed using a half mirror and a movable reference mirror, and the phase difference is calculated, by a terahertz wave generation/detection device that obtains a high S/N ratio by employing a terahertz wave generator for irradiating a non-linear optical crystal with angular phase-matched pump light and seed light, and a terahertz wave detector for irradiating a non-linear optical crystal with angular phase-matched pump light and terahertz waves. In order to match the optical path length of the pump light and the terahertz waves irrespective of the position of the movable reference mirror and the position of a measured object, a first optical delay device, and a second optical delay device that operates in conjunction with movement of a movable reference mirror of a Michelson interferometer, are introduced on the optical path of the pump light.
申请公布号 EP3104165(A1) 申请公布日期 2016.12.14
申请号 EP20140881674 申请日期 2014.09.22
申请人 Hitachi High-Technologies Corporation 发明人 SHIRAMIZU Nobuhiro
分类号 G01N21/3581;G01B9/02;G01J9/02 主分类号 G01N21/3581
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