| 摘要 |
PROBLEM TO BE SOLVED: To provide a new process which allows for production of a large area thin compound semiconductor film for use in a solar cell at low temperatures, because a process of producing a compound semiconductor film having a larger area more uniformly at a lower cost with high productivity is needed.SOLUTION: We succeeded to perform the production process of a compound semiconductor film at a low temperature through conversion of a metal film by using a supercritical fluid as a reaction solvent and a low toxicity organic compound as an additional element source. For example, in the selenization process, low toxicity diethyl selenium is used as the additional element source under a low temperature environment of 300°C for selenizing a CuIn precursor alloy film, and a CuInSecompound semiconductor film is prepared in a short time of about 1 hour. |
