THERMAL EXPANSION MICRO ACTUATOR, MICRO MIRROR FORMED DIRECTLY ON THE SAME, MICRO MIRROR ACTUATING APPARATUS USING THERMAL EXPANSION MICRO ACTUATOR, AND LIGHT SWITCH USING THE SAME

摘要

A thermal expansion micro actuator, a micro mirror formed directly on the same, a micro mirror actuating apparatus using the thermal expansion micro actuator, and a light switch using the same are provided to secure displacement larger than that of the existing thermal expansion micro actuator, satisfying two driving limit elements including maximum allowed temperature and yield stress. A thermal expansion micro actuator(100) is composed of a high temperature unit(101) of which temperature is increased up to high level due to high resistance by applying electricity and a low temperature unit(103) connected to the high temperature unit through a connecting unit(102), wherein the temperature of the low temperature unit is increased below the temperature of the high temperature unit due to resistance smaller than that of the high temperature unit. The thermal expansion micro actuator is bent from the high temperature unit to the low temperature unit when electricity is applied. An insulating layer(108) and a metal layer(109) are laminated in order on the outer surface of the high temperature unit at the opposite side of the low temperature unit.