| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for manufacturing a metal film forming product for forming a metal film on a substrate using a laser sintering method, which can strictly control processing conditions of a series of steps and a moving time of the substrate between steps to manufacture the metal film forming product having high reproducibility.SOLUTION: A system 100a for manufacturing a metal film forming product, comprises: a substrate setting part 2; a substrate processing apparatus 5; a substrate transfer path 12; and a control device 7. The substrate setting part 2 has a substrate moving stage 9 for placing a substrate 11. The substrate processing apparatus 5 includes: a dispersion application device 3 for applying a dispersion including metal fine particles on the substrate 11 to obtain a coating film; and a laser sintering apparatus 4 for irradiating the coating film with a laser beam. The substrate moving stage 9 moves along the substrate transfer path 12 between the substrate setting part 2 and the substrate processing apparatus 5. The control device 7 controls processing conditions in the substrate processing apparatus 5 and a moving time of the substrate moving stage 9 from the dispersion application device 3 to the laser sintering apparatus 4.SELECTED DRAWING: Figure 2 |
