发明名称 微細凸構造体の修正方法及び製造方法、並びに微細凸構造体製造システム
摘要 PROBLEM TO BE SOLVED: To provide a correction method of a fine convex structure which can correct easily the fine convex structures falling down unintentionally when the fine convex structure having fine convex structures is formed, and to provide a production method of the fine convex structure by using the correction method, and a system for producing the fine convex structure.SOLUTION: The fine convex structure 1 has a planar part 11 and fine convex structure parts 12 projected respectively from the planar part 11. The correction method of an inclination of the fine convex structure parts 12 when the fine convex structure parts 12 incline with respect to the direction CD perpendicular to the planar part 11, comprises: the fine convex structure parts 12, at the least, comprises a resin material shrinkable by imparting energy from the outside; energy is imparted from the outside to the relatively extended side faces 12a of the side faces of the inclined fine convex structure parts 12; making the relatively extended side faces 12a of the fine convex structure parts 12 shrink and correcting the inclination of the fine convex structure parts 12.
申请公布号 JP6044166(B2) 申请公布日期 2016.12.14
申请号 JP20120176939 申请日期 2012.08.09
申请人 大日本印刷株式会社 发明人 有塚 祐樹;長沼 宏之
分类号 B29C59/16;H01L21/027 主分类号 B29C59/16
代理机构 代理人
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