发明名称 |
PRESSURE RELIEF VALVE |
摘要 |
A micromechanical pressure relief valve arrangement comprises a stack of wafers. An active pressure relief valve is realized within the stack of wafers. A passive pressure relief valve is also realized within the stack of wafers, arranged in parallel to the active pressure relief valve. A check valve, also realized within the stack of wafers, is arranged in series with both the active pressure relief valve and the passive pressure relief valve. |
申请公布号 |
EP2349916(B1) |
申请公布日期 |
2016.12.14 |
申请号 |
EP20090822272 |
申请日期 |
2009.10.19 |
申请人 |
NanoSpace AB |
发明人 |
GRÖNLAND, Tor-Arne;RANGSTEN, Pelle;JONSSON, Kerstin;BEJHED, Johan |
分类号 |
B81B7/00;F16K15/14;F16K17/28;F16K99/00 |
主分类号 |
B81B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|