| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine concavo-convex pattern substrate with high optical characteristic and capable of decreasing a level difference at a joint part of a fine concavo-convex pattern.SOLUTION: A fine concavo-convex pattern substrate of the present invention has a lattice-like concavo-convex shape arranged periodically on a surface, and at least 700 cmof area. The lattice-like concavo-convex shape includes a first fine concavo-convex pattern part (111), a second fine concavo-convex pattern part (112), and a pattern joint part (113) between the first fine concavo-convex pattern part (111) and the second fine concavo-convex pattern part (112). A pitch of a convex part is at or shorter than 300 nm and a height of the convex part is at or lower than 1000 nm. |
