| 摘要 |
A large-numerical-aperture phase-shifting double-pinhole diffraction interferometer and testing method thereof, the diffraction interferometer comprising a test reference optical path (21), a test optical path (22) and a pinhole substrate (14); the pinhole substrate (14) is provided with a test pinhole (24) and a test reference pinhole (23) thereon; the diffraction wavefront emitted by the test pinhole (24) is reflected by an optical element assembly (19) to be tested adjacent to the pinhole substrate (14) and is converged adjacent to the test reference pinhole (23); and the wavefront carries surface shape information of the optical element assembly (19) to be tested, and after being reflected by the pinhole substrate (14), forms interference fringe with the diffraction wavefront emitted by the test reference pinhole (23). |
