| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate recovery apparatus for recovering a substrate by puncturing the substrate with a needle with optimum conditions in any cases, without being affected by a state of a sheet.SOLUTION: A substrate recovery apparatus 1 comprises: a plurality of substrates 2 having conducting properties; a sheet member 3 having insulating properties, on a surface of which the substrates 2 are attached; a stage 4 that holds the sheet member 3 in a substantially horizontal direction with the substrates 2 facing the downward direction; a plurality of needle members 8 having conducting properties and each having a needle point 8a capable of puncturing the sheet member 3; a drive section 10 that holds the needle members 8 with the needle points 8a facing the downward direction above the stage 4 and moves the needle members 8 in a longitudinal direction; and a conduction detecting section 6 that detects conduction among the needle members 8. The needle points 8a of the needle members 8 are arranged within an area smaller than a surface of one of the substrates 2 that is attached on the sheet member 3 on the substantially the same plane crossing in the longitudinal direction. The drive section 10 makes the needle members 8 kept insulated from each other. |
