表面処理装置、表面処理方法、プログラム及びコンピュータ記憶媒体

摘要

PROBLEM TO BE SOLVED: To simply adjust a surface condition of a substrate in a substrate treatment using block copolymer which contains a hydrophilic polymer and a hydrophobic polymer.SOLUTION: A surface treatment device for performing a surface treatment on a coating surface of a substrate on which block copolymer which contains hydrophilic polymer and hydrophobic polymer comprises: a processing container 130 for storing the substrate inside; a first coupling agent steam supply source 155 for supplying steam of a first coupling agent having a coupling part and a first surface part to inside the processing container 130; a second coupling agent steam supply source 162 for supplying steam of a second coupling agent which has a coupling part and a second surface part to inside the processing container 130; and a mixture mechanism 142 for mixing the coupling agents before being supplied to inside the processing container 130.