发明名称 |
VACUUM PUMP UNIT |
摘要 |
The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump (15) disposed at an outside-pressure side, and a booster pump (16) disposed at a vacuum side. The booster pump (16) and the main pump (15) are coupled in series. The booster pump (16) has a higher pumping speed than that of the main pump (15). Each of the main pump (15) and the booster pump (16) includes a pair of pump rotors (52a and 52b), a casing (50) having an inlet port and an outlet port, and a pair of magnet rotors (54 and 54) rotatable with the pair of pump rotors. |
申请公布号 |
EP1979619(B1) |
申请公布日期 |
2016.12.14 |
申请号 |
EP20070713802 |
申请日期 |
2007.01.29 |
申请人 |
Ebara Corporation |
发明人 |
HOZUMI, Takashi;MIYASHITA, Nobuhito;INADA, Takanori;MATAKE, Kozo;OJIMA, Yoshinori;MIYAKE, Susumu;USUI, Katsuaki |
分类号 |
F04C23/00;F04C18/16;F04C25/02;F04C28/02;H02K49/10 |
主分类号 |
F04C23/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|