| 摘要 |
PROBLEM TO BE SOLVED: To provide a mixed gas preparation device and a mixed gas preparation method capable of easily preparing desired mixed gas with high accuracy.SOLUTION: In the mixed gas preparation method, mixed gas is prepared by repeating a series of the following fixed volume gas extraction processes with a predetermined number of cycles depending on types of gas: a filling process where a raw material gas supply mechanism fills raw material gas from a gas supply source in a first chamber having a fixed volume; a decompression process where a decompression mechanism brings the raw material gas filled in the first chamber to an atmospheric pressure and normal temperature state; and a transfer process where a gas transfer mechanism transfers the raw material gas in the first chamber to a second chamber having a fixed volume. A control mechanism controls the number of times that the mixed gas needs to be transferred from the first chamber to the second chamber.SELECTED DRAWING: Figure 1 |
