APPARATUS FOR INSPECTING SHAPE OF METAL BODY, AND METHOD FOR INSPECTING SHAPE OF METAL BODY

摘要

[Problem] To more accurately inspect the shape of a metal body irrespective of the surface roughness of the metal body. [Solution] The apparatus for inspecting the shape of a metal body pertaining to the present invention is provided with a measurement device for radiating at least two illumination lights to a metal body and measuring two reflected lights of the illumination lights distinctly from each other from the metal body, and a computational processing device for calculating information used to inspect the shape of the metal body on the basis of the luminance values of the reflected lights. The measurement device has first and second illumination light sources each for radiating band-shaped illumination lights having mutually different peak wavelengths to the metal body, and a color line sensor camera for measuring the reflected light of the first illumination light and the reflected light of the second illumination light distinctly from each other, the first and second illumination light sources being arranged so that the angles formed between the respective optical axes thereof and the direction of specular reflection on the surface of the metal body of the optical axis of the color line sensor camera are substantially equal, and the wavelength difference of the peak wavelength of the first illumination light and the peak wavelength of the second illumination light being 5 nm to 90 nm.