发明名称 METHOD FOR DETECTING TIMING OF EXECUTING SEEDING, AND METHOD FOR MANUFACTURING SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for detecting seeding execution timing in which timing of executing seeding can be accurately detected with good reproducibility in seeding at the point of starting single crystal growth in the Czochralski method.SOLUTION: A method for detecting seeding execution timing has: a seed crystal arrangement process of arranging a seed crystal 19 at a seed crystal arrangement position above a raw material melt 18 arranged in a crucible 11 and separate from a raw material melt surface 181 by a distance h; a seed crystal surface imaging process of imaging the surface of the seed crystal 19 arranged in the seed crystal arrangement position by an imaging element; and a seeding point determination process of determining whether or not a timing reached a point of executing seeding based on an image captured in the seed crystal surface imaging process.SELECTED DRAWING: Figure 2
申请公布号 JP2016204192(A) 申请公布日期 2016.12.08
申请号 JP20150085834 申请日期 2015.04.20
申请人 SUMITOMO METAL MINING CO LTD 发明人 NITTA NOZOMI
分类号 C30B15/22 主分类号 C30B15/22
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