| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the environmental resistance of an ultrasonic array sensor. <P>SOLUTION: The ultrasonic array sensor 1 is provided with a plate-like base 10, and a plurality of recesses 12 each opening toward a main surface 11b are formed on the base 10. An insulating layer 21 is provided on the other main surface 11a of the base 10. A lower electrode 31, a piezoelectric film 41 and an upper electrode 51 are provided in this order from the insulating layer 21 side on the regions each corresponding to the plurality of recesses 12 on the insulating layer 21. A vibration detecting layer 40 is configured of the lower electrode 31, the piezoelectric film 41 and the upper electrode 51. On the piezoelectric film 41 and the upper electrode 51, a protective film 61 formed of a silicon oxide so as to cover the these is provided. By this configuration in the ultrasonic array sensor 1, the piezoelectric film 41 is prevented from corroding etc., and the environmental resistance of the ultrasonic array sensor 1 can be improved. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
