| 发明名称 |
METHOD FOR PRODUCING A UV PHOTODETECTOR |
| 摘要 |
This invention relates to a method for producing a photodetector based on the deposition of precursor system having a liquid phase. The photodetectors are characterized by a certain group of semiconductor materials which can be used as the absorber in solar-blind UV detectors. A facile route for the formation of thin layers of such absorber materials is disclosed. |
| 申请公布号 |
EP3099838(A1) |
申请公布日期 |
2016.12.07 |
| 申请号 |
EP20150700841 |
申请日期 |
2015.01.16 |
| 申请人 |
Merck Patent GmbH |
发明人 |
HOOKER, Rebekah;DESHMUKH, Ranjan Deepak;MISKIEWICZ, Pawel;KLYSZCZ, Andreas;BONRAD, Klaus;ALBRECHT, Thomas |
| 分类号 |
C23C18/12;H01L21/02;H01L31/0264;H01L51/56 |
主分类号 |
C23C18/12 |
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