发明名称 成膜方法
摘要 A film growing method includes: (A) attaching wall members to ends of a film grown surface of a base material; (B) growing a film on the film grown surface by a cold spray method; and (C) removing the wall members after a thickness of the grown film on the film grown surface becomes equal to a desired film thickness. It can be prevented that the side ends of the grown film are formed in a slope when a thick film is to be grown by using the cold spray.
申请公布号 JP6037885(B2) 申请公布日期 2016.12.07
申请号 JP20130030371 申请日期 2013.02.19
申请人 三菱重工業株式会社 发明人 齋藤 誠;平松 範之;福島 明
分类号 C23C24/04 主分类号 C23C24/04
代理机构 代理人
主权项
地址