发明名称 半導体装置およびその製造方法
摘要 The semiconductor device includes a first conductive layer, a first interlayer insulating film, a bit line, a first insulating film, a second interlayer insulating film, and a second conductive layer. The first insulating film that covers a side surface of the bit line has a portion perpendicular to a main surface of a semiconductor substrate in a region lower than a position lower than an uppermost portion of the first insulating film by a thickness, in a direction along the main surface of the semiconductor substrate, of the first insulating film that covers the side surface of the bit line at a lowermost portion of the bit line.
申请公布号 JP6040035(B2) 申请公布日期 2016.12.07
申请号 JP20130007115 申请日期 2013.01.18
申请人 ルネサスエレクトロニクス株式会社 发明人 牧 幸生
分类号 H01L21/8244;H01L21/768;H01L27/10;H01L27/11;H01L29/786 主分类号 H01L21/8244
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